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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Grain Boundary Location Control by Patterned Metal...

Grain Boundary Location Control by Patterned Metal Film in Excimer Laser Crystallized Polysilicon

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

175-180

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.175

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Online since:

April 1999

Authors:

L. Mariucci, R. Carluccio, A. Pecora, G. Fortunato, F. Massussi, V. Foglietti, D. Della Sala, J. Stoemenos

Keywords:

Excimer Laser Crystallization, Grain Boundary, Super Lateral Growth

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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