Grain Boundary Location Control by Patterned Metal Film in Excimer Laser Crystallized Polysilicon

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Periodical:

Solid State Phenomena (Volumes 67-68)

Edited by:

J.H. Werner, H.P. Strunk, H.W. Schock

Pages:

175-180

DOI:

10.4028/www.scientific.net/SSP.67-68.175

Citation:

L. Mariucci et al., "Grain Boundary Location Control by Patterned Metal Film in Excimer Laser Crystallized Polysilicon", Solid State Phenomena, Vols. 67-68, pp. 175-180, 1999

Online since:

April 1999

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Price:

$35.00

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