Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films

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Periodical:

Solid State Phenomena (Volumes 67-68)

Edited by:

J.H. Werner, H.P. Strunk, H.W. Schock

Pages:

169-174

DOI:

10.4028/www.scientific.net/SSP.67-68.169

Citation:

P.C. Van der Wilt and R. Ishihara, "Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films", Solid State Phenomena, Vols. 67-68, pp. 169-174, 1999

Online since:

April 1999

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Price:

$35.00

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