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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Grain Matrix Made with Excimer-Laser...

Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films

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Abstract:

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Polycrystalline Semiconductors V

Info:

Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

169-174

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.169

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Online since:

April 1999

Authors:

P.Ch. Van der Wilt, Ryoichi Ishihara

Keywords:

Excimer-Laser Crystallization, Location Control, Thin Film Transistor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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