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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Process to Fabricate High Performance Solid Phase...

Process to Fabricate High Performance Solid Phase Crystallized n-Type and p-Type Thin Film Transistors on Glass Substrate

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Abstract:

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Polycrystalline Semiconductors V

Info:

Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

547-552

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.547

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Online since:

April 1999

Authors:

K. Mourgues, F. Raoult, Youri Helen, T. Mohammed-Brahim, R. Rogel, O. Bonnaud

Keywords:

Glass Substrate, In Situ Doping, Solid Phase Crystallization, Thin Film Transistor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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