Modelling of the Doping Effect on the Capacitance of the Metal/N-Polysilicon/Oxide/N-Silicon Structure

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Periodical:

Solid State Phenomena (Volumes 67-68)

Edited by:

J.H. Werner, H.P. Strunk, H.W. Schock

Pages:

559-564

DOI:

10.4028/www.scientific.net/SSP.67-68.559

Citation:

H. Dib et al., "Modelling of the Doping Effect on the Capacitance of the Metal/N-Polysilicon/Oxide/N-Silicon Structure", Solid State Phenomena, Vols. 67-68, pp. 559-564, 1999

Online since:

April 1999

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$35.00

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