W-Polycide Gates with a Thin Polysilicon Layer: Microstructure and Resistivity

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Periodical:

Solid State Phenomena (Volumes 67-68)

Edited by:

J.H. Werner, H.P. Strunk, H.W. Schock

Pages:

583-0

DOI:

10.4028/www.scientific.net/SSP.67-68.583

Citation:

Y.O. Kim et al., "W-Polycide Gates with a Thin Polysilicon Layer: Microstructure and Resistivity", Solid State Phenomena, Vols. 67-68, pp. 583-0, 1999

Online since:

April 1999

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Price:

$35.00

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