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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Simulation of Point Defect Diffusion in...

Simulation of Point Defect Diffusion in Semiconductors

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

513-518

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.513

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Online since:

August 1999

Authors:

Oleg Velichko, A.K. Fedotov

Keywords:

Diffusion, Interface, Internal Stress, Point Defect

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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