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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Identification of Process Induced Defects in...

Identification of Process Induced Defects in Silicon Power Devices

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

539-544

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.539

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Online since:

August 1999

Authors:

Ekaterina V. Astrova, V.A. Kozlov, Alexander A. Lebedev, V.B. Voronkov

Keywords:

Capacitance Transient Spectroscopy, Deep Centers, Direct Bonding, Impurity, Process-Induced Defects, Silicon, Surface Contamination

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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