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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Rapid Low Temperature Diode Fabrication on P-Type...

Rapid Low Temperature Diode Fabrication on P-Type Czochralski Silicon on the Base of Simple Hydrogen Enhanced Thermal Donor Formation Processes

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

551-556

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.551

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Online since:

August 1999

Authors:

Reinhart Job, J.A. Weima, G. Grabosch, D. Borchert, Wolfgang R. Fahrner, V. Raiko, Alexander G. Ulyashin

Keywords:

Czochralski Silicon, Deep p-n Junctions, Diode, Hydrogen Diffusion, Thermal Donor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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