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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Hydrogen Diffusion and Trapping in...

Hydrogen Diffusion and Trapping in Microcrystalline Silicon

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

571-576

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.571

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Online since:

August 1999

Authors:

D. Ballutaud, L. Lusson, A. Boutry-Forveille, A. Lusson

Keywords:

Hydrogen Bonding, Hydrogen Diffusion, Hydrogen Trapping, Microcrystalline Silicon

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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