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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Atomic Structure of Chalcogen-Hydrogen Complexes...

Atomic Structure of Chalcogen-Hydrogen Complexes in Silicon

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

583-588

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.583

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Online since:

August 1999

Authors:

C.A.J. Ammerlaan, P.T. Huy

Keywords:

Magnetic Resonance, Selenium, Silicon, Sulfur

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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