Impurity Concentration Mapping in Mulitcrystalline Silicon Wafers

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Periodical:

Solid State Phenomena (Volumes 78-79)

Edited by:

H. Tomokage and T. Sekiguchi

Pages:

3-10

DOI:

10.4028/www.scientific.net/SSP.78-79.3

Citation:

S. Martinuzzi and O. Palais, "Impurity Concentration Mapping in Mulitcrystalline Silicon Wafers", Solid State Phenomena, Vols. 78-79, pp. 3-10, 2001

Online since:

April 2001

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Price:

$35.00

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