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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84The Structure and Photoluminescence of...

The Structure and Photoluminescence of Erbium-Doped Nanocrystalline Silicon Thin Films Produced by Reactive Magnetron Sputtering

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

637-644

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.637

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Online since:

November 2001

Authors:

M.Fátima Cerqueira, Maria Losurdo, M.V. Stepikhova, Olinda Conde, M.M. Giangregorio, Pedro Pinto, João Alves Ferreira

Keywords:

Erbium, Nanocrystalline Silicon, Photoluminescence (PL), RAMAN, Spectroscopic Ellipsometry (SE), X-Ray

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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