Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

99-104

DOI:

10.4028/www.scientific.net/SSP.82-84.99

Citation:

G.N. Kamaev et al., "Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon", Solid State Phenomena, Vols. 82-84, pp. 99-104, 2002

Online since:

November 2001

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$35.00

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