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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Rapid Joule Heating with Metal Films Used to...

Rapid Joule Heating with Metal Films Used to Crystallize Silicon Films

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

225-230

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.225

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Online since:

June 2003

Authors:

Y. Kaneko, Toshiyuki Sameshima

Keywords:

Activation, Crystallization, Defect States, Joule Heating, Thin Film Transistor

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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