Influence of Thermal Electron Irradiation on Crystallization of a Growing Si Film on a Glass Substrate

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

237-242

DOI:

10.4028/www.scientific.net/SSP.93.237

Citation:

S. Horita et al., "Influence of Thermal Electron Irradiation on Crystallization of a Growing Si Film on a Glass Substrate ", Solid State Phenomena, Vol. 93, pp. 237-242, 2003

Online since:

June 2003

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$35.00

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