Growth of Highly <100>-Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

287-294

DOI:

10.4028/www.scientific.net/SSP.93.287

Citation:

P. Reinig et al., "Growth of Highly <100>-Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering ", Solid State Phenomena, Vol. 93, pp. 287-294, 2003

Online since:

June 2003

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$35.00

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