Evaluation of Silicon Sheet Film Growth and Wafer Processing via Structural, Chemical and Electrical Diagnostics

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

211-216

DOI:

10.4028/www.scientific.net/SSP.95-96.211

Citation:

G. A. Rozgonyi et al., "Evaluation of Silicon Sheet Film Growth and Wafer Processing via Structural, Chemical and Electrical Diagnostics", Solid State Phenomena, Vols. 95-96, pp. 211-216, 2004

Online since:

September 2003

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$35.00

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