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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Measurement of Nitrogen Concentration in Cz...

Measurement of Nitrogen Concentration in Cz Silicon Crystals

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

489-494

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.489

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Online since:

September 2003

Authors:

N. Inoue, A. Hashimoto, K. Shingu, K. Masumoto

Keywords:

Charged Particles, Infrared Absorption, Nitrogen, Secondary Ion, Silicon Crystal

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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