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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77The Ozone Solubility and its Decay in Aqueous...

The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

211-214

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.211

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Online since:

January 2001

Authors:

F. De Smedt, Stefan De Gendt, Marc Heyns, Chris Vinckier

Keywords:

Decomposition, Kinetic, Ozone, Semiconductor Cleaning, Solubility

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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