Papers by Author: Hiroyuki Matsunami

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Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition
Authors: H. Fujiwara, Katsunori Danno, Tsunenobu Kimoto, T. Tojo, Hiroyuki Matsunami
205
High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(000-1) Face
Authors: Katsunori Danno, Tsunenobu Kimoto, Hiroyuki Matsunami
197
Homoepitaxial Growth of 4H-SiC on Trenched Substrates by Chemical Vapor Deposition
Authors: Yi Chen, Tsunenobu Kimoto, Yuuichi Takeuchi, Rajesh Kumar Malhan, Hiroyuki Matsunami
189
Surface Mechanisms in Homoepitaxial Growth on α-SiC{0001}-Vicinal Faces
Authors: Shun-ichi Nakamura, Tsunenobu Kimoto, Hiroyuki Matsunami
163
SiC Lateral Super-Junction Diodes Fabricated by Epitaxial Growth
Authors: Mineo Miura, Shun-ichi Nakamura, Jun Suda, Tsunenobu Kimoto, Hiroyuki Matsunami
859
High Temperature Deep Level Transient Spectroscopy Investigations of n-Type 4H-SiC Epitaxial Layers
Authors: Adolf Schöner, Keiko Fujihira, Tsunenobu Kimoto, Hiroyuki Matsunami
387
Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes
Authors: Tsunenobu Kimoto, Katsunori Danno, Keiko Fujihira, Hiromu Shiomi, Hiroyuki Matsunami
197
Uniformity Improvement in SiC Epitaxial Growth by Horizontal Hot-Wall CVD
Authors: Hiroaki Saitoh, Tsunenobu Kimoto, Hiroyuki Matsunami
185
Fast Epitaxial Growth of High-Quality 4H-SiC by Vertical Hot-Wall CVD
Authors: Keiko Fujihira, Tsunenobu Kimoto, Hiroyuki Matsunami
161
Wide-Area Homoepitaxial Growth of 6H-SiC on Nearly On-Axis (0001) by Chemical Vapor Deposition
Authors: Shun-ichi Nakamura, Tsunenobu Kimoto, Hiroyuki Matsunami
149
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