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Papers by Author: Kazuo Arai

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4H-SiC Carbon-Face Epitaxial Layers Grown by Low-Pressure Hot-Wall Chemical Vapor Deposition

Authors: Kazutoshi Kojima, Tetsuo Takahashi, Yuuki Ishida, Satoshi Kuroda, Hajime Okumura, Kazuo Arai

209

Continuous Growth of SiC Single Crystal by the Spray Dried Powder Made of Ultra-Fine Particle Precursors

Authors: Yoshimitsu Yamada, Shin Ichi Nishizawa, Shinichi Nakashima, Kazuo Arai

131

Large Diameter and Long Length Growth of SiC Single Crystal

Authors: Tomohisa Kato, Takaya Ohno, Fusao Hirose, Naoki Oyanagi, Shin Ichi Nishizawa, Kazuo Arai

High-Quality SiC Bulk Single Crystal Growth Based on Simulation and Experiment

Authors: Shin Ichi Nishizawa, Tomohisa Kato, Yasuo Kitou, Naoki Oyanagi, Fusao Hirose, Hirotaka Yamaguchi, Wook Bahng, Kazuo Arai

Influence of Stacking Faults on the I-V Characteristics of 4H-SiC Schottky Barrier Diodes Fabricated on the (11-20) Face

Authors: Kazutoshi Kojima, Takaya Ohno, Tatsuo Fujimoto, Masakazu Katsuno, Noboru Ohtani, Johji Nishio, Yuuki Ishida, Tetsuo Takahashi, Takaya Suzuki, Tomoyuki Tanaka, Kazuo Arai

925

SiC Device Limitation Breakthrough with Novel Floating Junction Structure on 4H-SiC

Authors: Kazuhiro Adachi, I. Omura, Rudi Ono, Johji Nishio, Takashi Shinohe, Hiromichi Ohashi, Kazuo Arai

887

Gate Oxide with High Dielectric Breakdown Strength after Undergoing a Typical Power MOSFET Fabrication Process

Authors: Satoshi Tanimoto, Masakatsu Hoshi, Norihiko Kiritani, Hideyo Okushi, Kazuo Arai

725

Single Material Ohmic Contacts Simultaneously Formed on the Source/P-Well/Gate of 4H-SiC Vertical MOSFETs

Authors: Norihiko Kiritani, Masakatsu Hoshi, Satoshi Tanimoto, Kazuhiro Adachi, Shin Ichi Nishizawa, Tsutomu Yatsuo, Hideyo Okushi, Kazuo Arai

669

Electrical Activation of Ion-Implanted Nitrogen and Aluminum in 4H-SiC by Excimer Laser Annealing

Authors: Yasunori Tanaka, Hisao Tanoue, Kazuo Arai

605

Reduction of Interface Trapped Density of SiO₂/4H-SiC by Oxidation of Atomic Oxygen

Authors: Ryouji Kosugi, Kenji Fukuda, Kazuo Arai

563