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Papers by Keyword: Epitaxial Layer

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Investigation of Crystal Defects in Epitaxial Layers on Nitrogen-Doped Substrates and a Method for their Suppression

Authors: Katsuhiko Nakai, Koichi Kitahara, Yasumitsu Ohta, Atsushi Ikari, Masahiro Tanaka

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Authors: Evgenia V. Kalinina, G. Kholuyanov, Alla A. Sitnikova, V. Kossov, R. Yafaev, Gerhard Pensl, Sergey A. Reshanov, Andrey O. Konstantinov, Anders Hallén

637

Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions

Authors: Evgenia V. Kalinina, G. Kholuyanov, G. Onushkin, D.V. Davydov, Anatoly M. Strel'chuk, A.S. Zubrilov, Anders Hallén, Andrey O. Konstantinov, V.A. Skuratov, J. Staňo

467

High Temperature Deep Level Transient Spectroscopy Investigations of n-Type 4H-SiC Epitaxial Layers

Authors: Adolf Schöner, Keiko Fujihira, Tsunenobu Kimoto, Hiroyuki Matsunami

387

Influence of Epitaxial Layer on SiC Schottky Diode Gas Sensors Operated under High-Temperature Conditions

Authors: Shinji Nakagomi, Hiroaki Shinobu, Lars Unéus, Ingemar Lundström, Lars-G. Ekedahl, Rositza Yakimova, Mikael Syväjärvi, Anne Henry, Erik Janzén, Anita Lloyd Spetz

1423

Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation

Authors: Michio Tajima, M. Tanaka, Norihiro Hoshino

597

Influence of the Crystalline Quality of Epitaxial Layers on Inversion Channel Mobility in 4H-SiC MOSFETs

Authors: Kazutoshi Kojima, Toshiyuki Ohno, Seiji Suzuki, Junji Senzaki, Shinsuke Harada, Kenji Fukuda, Mitsuhiro Kushibe, Koh Masahara, Yuuki Ishida, Sadafumi Yoshida, Tetsuo Takahashi, Takaya Suzuki, Tomoyuki Tanaka, Kazuo Arai

1053

Distribution Profile of Deep Levels in SiC Observed by Isothermal Capacitance Transient Spectroscopy

Authors: Makato Fujimaki, Rudi Ono, Mitsuhiro Kushibe, Koh Masahara, Kazutoshi Kojima, Takashi Shinohe, Hideyo Okushi, Kazuo Arai

851

Replication of Defects from 4H-SiC Wafer to Epitaxial Layer

Authors: Toshiyuki Ohno, Hirotaka Yamaguchi, Kazutoshi Kojima, Johji Nishio, Koh Masahara, Yuuki Ishida, Tetsuo Takahashi, Takaya Suzuki, Sadafumi Yoshida

447

A Simple Mapping Method for Elementary Screw Dislocations in Homoepitaxial SiC Layers

Authors: Seoyong Ha, William M. Vetter, Michael Dudley, Marek Skowronski

443