Crystallization Mechanism of Si/Cu100-xZrx Bilayer Film for Write-Once Blue Laser Optical Recording Media
Si/Cu100xZrx (x= 0~38.1) bilayer recording thin films were deposited on nature oxidized silicon wafer, and glass substrate by magnetron sputtering. The ZnS-SiO2 films were used as protective layers. We have studied the thermal property, optical property, and crystallization mechanism of the Si/Cu100-xZrx bilayer thin films. The optical contrasts of the Si/Cu100-xZrx (x= 0~38.1) bilayer films under 405 nm wavelength are all larger than 15%, and it reaches a high value of 40%, as x= 38.1. This indicates that the Si/Cu100-xZrx (x= 0~38.1) bilayer films are suitable for blue laser optical recording.
Joong Hee Lee
S. L. Ou et al., "Crystallization Mechanism of Si/Cu100-xZrx Bilayer Film for Write-Once Blue Laser Optical Recording Media", Advanced Materials Research, Vols. 123-125, pp. 643-646, 2010