Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode

Abstract:

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In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna in MOS structure are evaluated based on the electromagnetic simulation using finite difference time domain (FDTD) method.

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Periodical:

Edited by:

Arturs Medvids

Pages:

201-204

DOI:

10.4028/www.scientific.net/AMR.222.201

Citation:

H. Satoh et al., "Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode", Advanced Materials Research, Vol. 222, pp. 201-204, 2011

Online since:

April 2011

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$35.00

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