Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode

Hiroaki Satoh; Yuki Matsuo; Hiroshi Inokawa; Atsushi Ono

doi:10.4028/www.scientific.net/AMR.222.201

Paper Titles

Detection of the Nanostructures in ZnO Thin Films by Using Optical Methods
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Comparative Study of Photoluminescence in Silicon and Zinc Oxide Nanowires
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Development of Microclimate Regulatory Clothes
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Influence of Impurity Band on Seebeck Coefficient in Heavily-Doped Si
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Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode
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Si-Based Single-Dopant Atom Devices
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Fabrication of the Field Emitter Array with a Built-in Suppressor Gate
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Random Error in Intensity Spectrum Measured with THz-TDS - No Relation to the Intensity Fluctuation of Fs-Laser
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Preparation and Evaluation of Novel Sugar Dendritic Gd-DTPA Complexes for MRI Contrast Agents and Phospha Sugars for Anti-Tumour Agents
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 222Investigation of Adhesion Materials for Gold...

Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode

Abstract:

In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna in MOS structure are evaluated based on the electromagnetic simulation using finite difference time domain (FDTD) method.