Fabrication of the Field Emitter Array with a Built-in Suppressor Gate
To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.
Y. Takagi et al., "Fabrication of the Field Emitter Array with a Built-in Suppressor Gate", Advanced Materials Research, Vol. 222, pp. 209-212, 2011