Fabrication of the Field Emitter Array with a Built-in Suppressor Gate

Yasuo Takagi; Akifumi Koike; Takahiro Fujino; Toru Aoki; Y. Neo; Hidenori Mimura; T. Nishi; T. Yoshida; Masayoshi Nagao; K. Sakai; Hidekazu Murata

doi:10.4028/www.scientific.net/AMR.222.209

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 222Fabrication of the Field Emitter Array with a...

Fabrication of the Field Emitter Array with a Built-in Suppressor Gate

Abstract:

To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.

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Periodical:

Advanced Materials Research (Volume 222)

Pages:

209-212

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.222.209

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Online since:

April 2011

Authors:

Yasuo Takagi, Akifumi Koike, Takahiro Fujino, Toru Aoki, Y. Neo, Hidenori Mimura, T. Nishi, T. Yoshida, Masayoshi Nagao, K. Sakai, Hidekazu Murata

Keywords:

Electrostatics Lens, Micro-Column Electron Beam Microscope, Multi-Gated Field Emitter, Multiple Column, Suppressor Gate

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