Fabrication of the Field Emitter Array with a Built-in Suppressor Gate

Abstract:

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To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.

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Periodical:

Edited by:

Arturs Medvids

Pages:

209-212

DOI:

10.4028/www.scientific.net/AMR.222.209

Citation:

Y. Takagi et al., "Fabrication of the Field Emitter Array with a Built-in Suppressor Gate", Advanced Materials Research, Vol. 222, pp. 209-212, 2011

Online since:

April 2011

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$35.00

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