Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure

Abstract:

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A 100GHz planar helix with straight-edge connections slow-wave structure incorporating coplanar waveguide feed has been designed and fabricated. The proposed fabrication process can produce high-aspect-ratio planar helical structures which is essential for sheet electron beam traveling-wave tube application. The photoresists used in this process can be easily stripped after electroplating of three-dimensional structures.

Info:

Periodical:

Edited by:

Lynn Khine and Julius M. Tsai

Pages:

17-20

DOI:

10.4028/www.scientific.net/AMR.254.17

Citation:

C. S. Chua et al., "Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure", Advanced Materials Research, Vol. 254, pp. 17-20, 2011

Online since:

May 2011

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Price:

$35.00

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