Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure
A 100GHz planar helix with straight-edge connections slow-wave structure incorporating coplanar waveguide feed has been designed and fabricated. The proposed fabrication process can produce high-aspect-ratio planar helical structures which is essential for sheet electron beam traveling-wave tube application. The photoresists used in this process can be easily stripped after electroplating of three-dimensional structures.
Lynn Khine and Julius M. Tsai
C. S. Chua et al., "Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure", Advanced Materials Research, Vol. 254, pp. 17-20, 2011