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Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure

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Abstract:

A 100GHz planar helix with straight-edge connections slow-wave structure incorporating coplanar waveguide feed has been designed and fabricated. The proposed fabrication process can produce high-aspect-ratio planar helical structures which is essential for sheet electron beam traveling-wave tube application. The photoresists used in this process can be easily stripped after electroplating of three-dimensional structures.

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Info:

Periodical:

Advanced Materials Research (Volume 254)

Pages:

17-20

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.17

Citation:

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Online since:

May 2011

Authors:

Cier Siang Chua, Ming Lin Julius Tsai, Min Tang, Sheel Aditya, Zhong Xiang Shen

Keywords:

Coplanar Waveguide (CPW), Electroplating, Micro-Fabrication, Photolithography, Planar Helix, Slow-Wave Structure, Thick Photoresist, Traveling-Wave Tube

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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References

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