Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever

Abstract:

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Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.

Info:

Periodical:

Edited by:

Lynn Khine and Julius M. Tsai

Pages:

13-16

DOI:

10.4028/www.scientific.net/AMR.254.13

Citation:

B. Bais et al., "Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever", Advanced Materials Research, Vol. 254, pp. 13-16, 2011

Online since:

May 2011

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Price:

$35.00

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