Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever
Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.
Lynn Khine and Julius M. Tsai
B. Bais et al., "Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever", Advanced Materials Research, Vol. 254, pp. 13-16, 2011