Preface
Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors
p.1
p.1
Thick-Film Deposition of High-Viscous Liquid Photopolymer
p.5
p.5
Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application
p.9
p.9
Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever
p.13
p.13
Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure
p.17
p.17
Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force
p.21
p.21
A Static Micromixer Inspired from Fractal-Like Natural Flow Systems
p.25
p.25
AlN Actuator for Tunable RFMEMS Capacitor
p.29
p.29
Preface
Abstract:
You might also be interested in these eBooks
Info:
Periodical:
Advanced Materials Research (Volume 254)
Online since:
May 2011
Сopyright:
© 2011 Trans Tech Publications Ltd. All Rights Reserved
Share: