Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application

Abstract:

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Platinum (Pt) thin film microheater is designed for integration in a well-known dog bone-like microtensile test structure for high temperature tensile properties measurement. COMSOL Multiphysics tool with electro-thermal modeling was employed to predict the Joule heating capability of three different configurations of Ptmicroheater. The temperature of the test structure resulted from the three micorheater configurations as a function of total dissipated power was plotted for comparison. The microheater with the dendritic-like configuration was found to have the highest power efficiency of 3.19°C/mW in heating up the microtensile test structure.

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Periodical:

Edited by:

Lynn Khine and Julius M. Tsai

Pages:

9-12

DOI:

10.4028/www.scientific.net/AMR.254.9

Citation:

W. C. Ang et al., "Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application", Advanced Materials Research, Vol. 254, pp. 9-12, 2011

Online since:

May 2011

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Price:

$35.00

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