Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application
Platinum (Pt) thin film microheater is designed for integration in a well-known dog bone-like microtensile test structure for high temperature tensile properties measurement. COMSOL Multiphysics tool with electro-thermal modeling was employed to predict the Joule heating capability of three different configurations of Ptmicroheater. The temperature of the test structure resulted from the three micorheater configurations as a function of total dissipated power was plotted for comparison. The microheater with the dendritic-like configuration was found to have the highest power efficiency of 3.19°C/mW in heating up the microtensile test structure.
Lynn Khine and Julius M. Tsai
W. C. Ang et al., "Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application", Advanced Materials Research, Vol. 254, pp. 9-12, 2011