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Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application

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Abstract:

Platinum (Pt) thin film microheater is designed for integration in a well-known dog bone-like microtensile test structure for high temperature tensile properties measurement. COMSOL Multiphysics tool with electro-thermal modeling was employed to predict the Joule heating capability of three different configurations of Ptmicroheater. The temperature of the test structure resulted from the three micorheater configurations as a function of total dissipated power was plotted for comparison. The microheater with the dendritic-like configuration was found to have the highest power efficiency of 3.19°C/mW in heating up the microtensile test structure.

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Periodical:

Advanced Materials Research (Volume 254)

Pages:

9-12

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.9

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Online since:

May 2011

Authors:

Wan Chia Ang, Man I Lei, Julius Ming Lin Tsai, Kam Chew Leong, Chuan Seng Tan

Keywords:

High-Temperature, Microtensile Test, Platinum Microheater

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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