Advanced Materials Research Vols. 301-303

Abstract: This letter suggests a method to improve tracking performance of an H-type XY stage with air bearings and flexure hinge mechanisms. The flexure hinge mechanisms are employed to prevent failure of the air bearings when the yaw motion error of the H-type stage is controlled using a control algorithm called gantry control. Adoption of the flexure hinge mechanism combined with the gantry control leads to occurrence of mutual ripple. Ripple should be handled to obtain good tracking performance. Modeling of the mutual ripple and simulation of two compensation algorithms are presented.