Influence of Magnetron Effect on Barium Hexaferrite Thin Layers

Abstract:

In this paper, we study the effects of a magnet, located in the cathode, on barium hexaferrite thin films deposited by RF magnetron sputtering technique. During the process, these effects can modify thickness, roughness and stress of coatings. The characteristics of the deposited layers depend on the substrate position that is located opposite of magnetron cathode. In the "magnetron area", one can observe that the high stress can produce cracks or detachment of layers and the increasing of both depositing rate and surface roughness. After sputtering elaboration, barium hexaferrite films are in a compressive stress mode. But, after the post-deposition heat treatment these films are in a tensile stress mode. To improve the quality of BaM films, the subsrtate has to be set outside the magnetron area.

• Periodical: Advanced Materials Research (Volume 324)
• Pages: 97-100
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.324.97
• Online since: August 2011
• Authors: Harouna Hassane, Jean Pierre Chatelon, Jean Jacques Rousseau, Ali Siblini, Adoum Kriga
• Keywords: BAM, Magnetron, Morphological, Roughness, Sputtering, Stress, Thin Film

References

[1] A. Richardt, A.M. Durand, « Le vide - Les couches minces - Les couches dures », Ed In Fine (1994)

[2] B. Bayard, J.P. Chatelon, M. Le Berre, H. Joisten, J.J. Rousseau, D. Barbier, Sensors and actuators: A. Physical 99/1-2 (2002) 207

DOI: 10.1016/s0924-4247(01)00888-3

[3] S. Capraro, J.P. Chatelon, H. Joisten, M. Le Berre, B. Bayard, D. Barbier & J.J. Rousseau, J. Applied Physics, 93, n°12 (2003) 9898

DOI: 10.1063/1.1576898

[4] B. Window, G.L. Harding, C. Horrigan, T. Bell, J. Vac. Sci. Technol., A 10 (1992) 3278

[5] H. Windischmann, Crit. Rev. Solid State 17 (1992) 547.

[6] R.W. Hoffman, in: Physics of Thin Films, in: Georg Hass and Rudolf E. Thun (Ed.), vol 3 Academic Press, New York and London, 1966, 211

[7] R.W. Hoffman, in: The Use of Thin Films in Physical Investigations, in: J.C. Anderson (Ed.), Academic Press, London, 1966, 261

[8] D. W. Hoffman, J. A. Thornton, Thin Solid Films, 40 (1977) 355.

[9] G. Moulard, G. Contoux, G. Gardet, G. Motyl, M. Courbon, J. Vac. Sci. Technol. A 16 (1998) 736

[10] C. Gautier, G. Moulard, J.P. Chatelon and G. Motyl, Thin Solid Films, 384 (2001) 102

DOI: 10.1016/s0040-6090(00)01806-x

[11] G.G. Stoney, Soc. Lond. A 82 (1909) 172.

[12] T.I. Kamins, Sensors & Actuators, A23 (1990), 817

[13] J. Adamczewska, J. Dubzynski, Thin solid films, 113 (1984), 271