Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass

Abstract:

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A method of fabrication of micro via-hole by wet-etching of Pyrex glass is presented in the paper. The through holes with double funnel-shape have been fabricated attribute to isotropic etching. Furthermore, the funnel-shape holes are advantageous to the joint sealing and have been applied to fabricate microfluid chips. The results show that the proportioning of corrosion solution is HF:HCl:H2O=3:6:10, and the corrosion rate is about 0.67um/min, the diameter of the holes on the both-side of the wafer is only 750 um, the middle ones are 300um

Info:

Periodical:

Advanced Materials Research (Volumes 60-61)

Edited by:

Xiaohao Wang

Pages:

303-306

DOI:

10.4028/www.scientific.net/AMR.60-61.303

Citation:

S. X. Jia et al., "Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass", Advanced Materials Research, Vols. 60-61, pp. 303-306, 2009

Online since:

January 2009

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Price:

$35.00

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