Design of a Hybrid-Type Electrostatically Driven Microgripper Integrated Vacuum Tool

Li Ning Sun; Tao Chen; Li Guo Chen; Xin Xin Li

doi:10.4028/www.scientific.net/AMR.60-61.40

Paper Titles

Metrology Method of Line Edge Roughness with Nanometer Scale Precision Using Atomic Force Microscopes
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Scanning Ion Conductance Microscopy and its Applications in Nanobiology and Nanomedicine
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Analysis of Temperature Effects on a Fully-Symmetrical Micromachined Gyroscope
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The I-V Characteristics and Percolation Threshold of the Cement-Based Materials Filled with Multi-Walled Carbon Nanotubes
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Design of a Hybrid-Type Electrostatically Driven Microgripper Integrated Vacuum Tool
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A DC Voltage Driven Flow-Through Electroporation Microchip
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Detection for Spring Constant of Microcantilevers in Atomic Force Microscopy Based on Frequency Measurements
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Photochemical Synthesis of Gold Nanostructures in Different Solvents
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MEMS Dielectrophoresis Device for Osteoblast Cell Stimulation
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61Design of a Hybrid-Type Electrostatically Driven...

Design of a Hybrid-Type Electrostatically Driven Microgripper Integrated Vacuum Tool

Abstract:

This work is focused on design and fabrication of a hybrid-type electrostatic silicon microgripper integrated vacuum tool. Vacuum tools are integrated in this novel microgripper in order to improve its pick and place capability. Surface and bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafer (i.e., no silicon on insulator wafer is used). And the bonding technology is used to form the gas pipes for the vacuum tool. The linear motion of the microactuator is converted into a rotational gripping motion by a system of spring beams. At a driving voltage of 80V, a deflection of 25μm at the arm tip of the gripper is achieved.