Modeling and Simulation of Opposite Type MATA Using MEMS Nodal Cell Library

Dong Xun Lu; Wei Hua Li

doi:10.4028/www.scientific.net/AMR.60-61.445

Paper Titles

Flexible Microelectrode Array on Parylene for Subretinal Stimulation and its Biocompatibility Test
p.425

Molecular Dynamics Simulation on the Out-of Plane Thermal Conductivity of Single-Crystal Carbon Thin Films
p.430

Molecular Dynamics Modeling and Effects of Cutting Parameters on Nanometric Cutting Process
p.435

Deposition Characteristics of Direct-Write Suspended Micro/Nano-Structures
p.439

Modeling and Simulation of Opposite Type MATA Using MEMS Nodal Cell Library
p.445

Experimental Study on Hot Embossing of Micro/Nano Grating
p.450

Simulation of Nanofibers Movement for Near-Field Electrospinning
p.456

The Effect of Temperature on Field Emission Current
p.461

Numerical Simulation of Viscous Jet for Near-Field Electrospinning
p.465

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61Modeling and Simulation of Opposite Type MATA...

Modeling and Simulation of Opposite Type MATA Using MEMS Nodal Cell Library

Abstract:

In MEMS nodal analysis method, more available libraries of nodal models are needed. By analyzing the mathematic model and the equivalent model of the electro-thermal-mechanical beam, this paper shows the steps of building a library of a nodal element for HSPICE. Then the cell library is used to simulate the opposite type micro-array thermal actuator (MATA). At last it shows the DC sweep performance and the transient performance of opposite type MATA. In this paper, to verify the reusability of the beam cell, opposite type MATA is all consisted of the electro-thermal-mechanical beam cell in library.