Research of Preparation and Etching of PS Microspheres Film

Dong Sheng Peng; Zhi Gang Chen; Cong Cong Tan

doi:10.4028/www.scientific.net/AMR.602-604.1470

Paper Titles

Temperature Dependence of Raman Scattering in M-Plane GaN with Varying III/V Ratios
p.1453

Simulation of the Growth, Structure and Crystallization of the Amorphous Silicon Thin Film
p.1457

Effects of Annealing Temperature on Structure and Properties of PLBZT Ferroelectric Thin Films Synthesized by Sol-Gel Processing
p.1461

Chemical Structure of Fluorocarbon Films Deposited by Pulsed Plasma Thruster
p.1465

Research of Preparation and Etching of PS Microspheres Film
p.1470

Effect of Annealing Temperature on Structural and Electrical Properties of Bismuth Ferrite Thin Film
p.1474

Chitin Nanofibers / Epoxy Resin Optically Transparent Nanocomposite Films
p.1479

Fabrication of Polyelectrolyte/TiO₂ Hybrid Membrane via a Simple Method and Characterization of its Thermal Behavior
p.1484

A Simple Model for Mechanical Behavior of PET Thin Film Deposited with Pure Aluminum on Both Surfaces and the Experimental Study
p.1488

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 602-604Research of Preparation and Etching of PS...

Research of Preparation and Etching of PS Microspheres Film

Abstract:

In this article, the polystyrene (PS) microspheres monolayer film was manufactured on silicon substrate by spin-coating, and the effect of PS microspheres concentration on preparation of monolayer film was discussed in detail. With a view to the application of graphic substrate technology, the etching effect with different technological parameter (etching time and power) was researched, and a set of appropriate process parameter were obtained, which met the requirements of preparation of the extension graphics silicon substrate.

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Periodical:

Advanced Materials Research (Volumes 602-604)

Pages:

1470-1473

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.602-604.1470

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Online since:

December 2012

Authors:

Dong Sheng Peng, Zhi Gang Chen, Cong Cong Tan

Keywords:

Etching, Micro-Sphere, Polystyrene, Spin-Coating

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