Predictive Modeling of TiN Coating Roughness

Abstract:

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N₂ pressure, Argon pressure and turntable speed were selected as process variables. Coating surface roughness as an important coating characteristic was characterized using Atomic Force Microscopy (AFM) equipment. Analysis of variance (ANOVA) is used to determine the significant factors influencing resultant TiN coating roughness. Based on that, a quadratic polynomial model equation represented the process variables and coating roughness was developed. The result indicated that the actual coating roughness of validation runs data fell within the 90% prediction interval (PI) and the residual errors were very low. The findings from this study suggested that Argon pressure, quadratic term of N₂ pressure, quadratic term of turntable speed, interaction between N₂ pressure and turntable speed, and interaction between Argon pressure and turntable speed influenced the TiN coating surface roughness.

• Periodical: Advanced Materials Research (Volume 626)
• Pages: 219-223
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.626.219
• Online since: December 2012
• Authors: Abdul Syukor Mohamad Jaya, Siti Zaiton Mohd Hashim, Habibollah Haron, Muhd Razali Muhamad, Md Nizam Abd Rahman, A. Samad Hasan Basari
• Keywords: Interaction, Modeling, PVD, RSM, Sputtering, Surface Roughness (SR), TiN

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