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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 153-155Vacancy Distributions in Silicon and Methods for...

Vacancy Distributions in Silicon and Methods for Their Accurate Determination

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

Pages:

111-136

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.153-155.111

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Online since:

November 1997

Authors:

Horst Zimmermann

Keywords:

Deep Level Transient Spectroscopy, Diffusion, Method for Vacancy Concentration Measurement, Microwave Photoconductive Decay (μ-PCD), Self-Interstitial, Vacancy, Wafer Mapping

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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