Vacancy Distributions in Silicon and Methods for Their Accurate Determination

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

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Edited by:

D.J. Fisher

Pages:

111-136

Citation:

H. Zimmermann, "Vacancy Distributions in Silicon and Methods for Their Accurate Determination", Defect and Diffusion Forum, Vols. 153-155, pp. 111-136, 1998

Online since:

November 1997

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