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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 153-155Vacancies and Vacancy Defects in Si Observed by...

Vacancies and Vacancy Defects in Si Observed by Positron Annihilation

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

Pages:

97-110

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.153-155.97

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Online since:

November 1997

Authors:

Pekka J. Hautojärvi, Kimmo Saarinen, J. Mäkinen, C. Corbel

Keywords:

Diffusion, Divacancy, Donors, Electron Irradiation, Electron Paramagnetic Resonance (EPR), Hydrogen Implantation, Oxygen, Positron Annihilation, Silicon, Vacancy

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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