Review of Growth Striations in CZ and MCZ Silicon Wafers

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

Main Theme:

Edited by:

D.J. Fisher

Pages:

159-182

DOI:

10.4028/www.scientific.net/DDF.153-155.159

Citation:

H. Yamagishi "Review of Growth Striations in CZ and MCZ Silicon Wafers", Defect and Diffusion Forum, Vols. 153-155, pp. 159-182, 1998

Online since:

November 1997

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$35.00

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