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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 153-155Analytical Expressions for the Length of Stacking...

Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

Pages:

205-0

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.153-155.205

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Online since:

November 1997

Authors:

N.K. Chen, K.C. Yu, C. Lee

Keywords:

Diffusion of Interstitials, Nitridation Treatments, Stacking-Fault Shrinkage

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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