Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

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Edited by:

D.J. Fisher

Pages:

205-0

DOI:

10.4028/www.scientific.net/DDF.153-155.205

Citation:

N.K. Chen et al., "Analytical Expressions for the Length of Stacking Faults during Thermal Nitridation of Oxidized Silicon and Silicon", Defect and Diffusion Forum, Vols. 153-155, pp. 205-0, 1998

Online since:

November 1997

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