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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 194-199Effect of Surface Condition on the Solid...

Effect of Surface Condition on the Solid Solubility of Substitutional Gold in the Out-Diffusion of Supersaturated Gold in Silicon

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Diffusion in Materials DIMAT2000

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Periodical:

Defect and Diffusion Forum (Volumes 194-199)

Pages:

623-628

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.194-199.623

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Online since:

April 2001

Authors:

Masami Morooka, Yukio Nakabayashi, Satoru Matsumoto

Keywords:

Au:Si, Gold in Silicon, Impurity Diffusion in Semiconductors, Solubility of Impurities, Substitutional and Interstitial Impurities, Supersaturated Impurities

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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