Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation

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Periodical:

Defect and Diffusion Forum (Volumes 206-207)

Edited by:

D.J. Fisher

Pages:

111-116

DOI:

10.4028/www.scientific.net/DDF.206-207.111

Citation:

I. Kamata et al., "Structural and Electrical Study of 4H-SiC CVD-Grown Layer with Micropipe Dissociation", Defect and Diffusion Forum, Vols. 206-207, pp. 111-116, 2002

Online since:

July 2002

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$35.00

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