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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 221-223In-Diffusion Concentration Profiles of Dopants in...

In-Diffusion Concentration Profiles of Dopants in Semiconductors

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Defects and Diffusion in Semiconductors VI

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Periodical:

Defect and Diffusion Forum (Volumes 221-223)

Pages:

109-122

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.221-223.109

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Online since:

November 2003

Authors:

E. Antoncik

Keywords:

Diffusion Coefficient, In-Diffusion, Profile, Reaction-Diffusion Equations

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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