Diffusion of Implanted Metals in Tantalum Silicide

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Periodical:

Edited by:

D. L. Beke, Z. Erdélyi and I. A. Szabó

Pages:

151-154

DOI:

10.4028/www.scientific.net/DDF.264.151

Citation:

F. Salman et al., "Diffusion of Implanted Metals in Tantalum Silicide", Defect and Diffusion Forum, Vol. 264, pp. 151-154, 2007

Online since:

April 2007

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