Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor

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Periodical:

Edited by:

L. Zhang

Pages:

1-24

DOI:

10.4028/www.scientific.net/KEM.196.1

Citation:

H. H. Cheng et al., "Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor", Key Engineering Materials, Vol. 196, pp. 1-24, 2001

Online since:

January 2001

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