Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

223-228

DOI:

10.4028/www.scientific.net/KEM.238-239.223

Citation:

J. Y. Park et al., "Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization", Key Engineering Materials, Vols. 238-239, pp. 223-228, 2003

Online since:

April 2003

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Price:

$35.00

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