An Analysis of the Pad Deformation for Improved Planarization

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

241-246

DOI:

10.4028/www.scientific.net/KEM.238-239.241

Citation:

T.-L. Horng "An Analysis of the Pad Deformation for Improved Planarization", Key Engineering Materials, Vols. 238-239, pp. 241-246, 2003

Online since:

April 2003

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$35.00

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