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HomeKey Engineering MaterialsKey Engineering Materials Vols. 238-239Development of New Mica Abrasives Suitable for...

Development of New Mica Abrasives Suitable for High Performance Mechanochemical Polishing of Si Wafers

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Advances in Abrasive Technology V

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Periodical:

Key Engineering Materials (Volumes 238-239)

Pages:

253-256

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.238-239.253

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Online since:

April 2003

Authors:

Nobuo Yasunaga, Shojiro Okada

Keywords:

Hard Polisher, Mechanochemical Polishing, Mica Abrasive, Silicon Wafer

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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