Development of a Polishing Disc Containing Granulated Fine Abrasives

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

257-262

Citation:

H. Nakamura et al., "Development of a Polishing Disc Containing Granulated Fine Abrasives", Key Engineering Materials, Vols. 238-239, pp. 257-262, 2003

Online since:

April 2003

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[2] J. Ikeno: Fixed fine abrasive polishing of silicon wafer, Journal of the Japan Society for Grinding Engineering, Vol. 44 (2000) p.433.

[3] H. Noguchi, Y. Abe, K. Tyou, T. Nakagawa: On the manufacture of fine grain silica wheel, Proceedings of the Japan Society for Precision Engineering 1994 Spring Meeting (1994) p.511.

[4] K. Tyou, H. Oguchi, T. Nakagawa: Mirror surface grinding by fine grain silica wheel, Proceedings of the Japan Society for Precision Engineering 1994 Spring Meeting (1994) p.513.

[5] Y. Nakano: Attraction of the gel form learned from the salmon roe, Journal of the Japan Society for Chemistry and Education, Vol. 48 (2000) p.36. Fig. 5 Relation between polishing time and finished surface roughness.