A Study of the Characteristics of the Diamond Dresser in the CMP Process

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Periodical:

Key Engineering Materials (Volumes 257-258)

Edited by:

Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa

Pages:

371-376

Citation:

Y. S. Liao et al., "A Study of the Characteristics of the Diamond Dresser in the CMP Process", Key Engineering Materials, Vols. 257-258, pp. 371-376, 2004

Online since:

February 2004

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